The effect of carbonaceous contamination on the investigation of the surface oxide on silicon by angle-resolved XPS

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Bibliographic Details
Main Authors: GRIES, W. H, ADEM, E. H
Format: Conference Proceeding
Language:English
Subjects:
Analytical chemistry
Chemistry
Exact sciences and technology
Spectrometric and optical methods
Online Access:Get full text
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ISSN:0026-3672
1436-5073