The effect of carbonaceous contamination on the investigation of the surface oxide on silicon by angle-resolved XPS

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Main Authors: GRIES, W. H, ADEM, E. H
Format: Conference Proceeding
Language:English
Subjects:
Analytical chemistry
Chemistry
Exact sciences and technology
Spectrometric and optical methods
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ADEM, E. H
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identifier ISSN: 0026-3672
ispartof Mikrochimica acta (1966. Print), 1990, Vol.2 (1-6), p.71-80
issn 0026-3672
1436-5073
language eng
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source Springer Online Journal Archives
subjects Analytical chemistry
Chemistry
Exact sciences and technology
Spectrometric and optical methods
title The effect of carbonaceous contamination on the investigation of the surface oxide on silicon by angle-resolved XPS
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