Surface kinetics with low ion energy bombardment in fluorocarbon plasmas

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Bibliographic Details
Published in:Plasma sources science & technology 2007-11, Vol.16 (4), p.813-821
Main Authors: Nelson, C T, Sant, S P, Overzet, L J, Goeckner, M J
Format: Article
Language:English
Subjects:
Exact sciences and technology
Optical (ultraviolet, visible, infrared) measurements
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma diagnostic techniques and instrumentation
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/16/4/017