Engineered HTS microbridges

A variety of techniques to reproducibly engineer microbridges in high-quality epitaxial YBCO films exist. A report is presented on two such techniques that have resulted in high-yield processes for fabricating both DC and RF SQUIDs operating at temperatures as high as 82 K. The results of these devi...

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Bibliographic Details
Published in:IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) 1991-03, Vol.27 (2), p.3209-3214
Main Authors: Simon, R.W., Bulman, J.B., Burch, J.F., Coons, S.B., Daly, K.P., Dozier, W.D., Hu, R., Lee, A.E., Luine, J.A., Platt, C.E., Schwarzbek, S.M., Wire, M.S., Zani, M.J.
Format: Article
Language:English
Subjects:
665300 > Interactions Between Beams & Condensed Matter-- (1992-)
ALKALINE EARTH METAL COMPOUNDS
Applied sciences
BARIUM COMPOUNDS
BARIUM OXIDES
BEAMS
CHALCOGENIDES
Circuits
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Conductive films
COPPER COMPOUNDS
COPPER OXIDES
ELECTRONIC EQUIPMENT
Electronics
EPITAXY
ETCHING
Exact sciences and technology
FABRICATION
FLUXMETERS
High temperature superconductors
HIGH-TC SUPERCONDUCTORS
ION BEAMS
JUNCTIONS
MEASURING INSTRUMENTS
MICROELECTRONICS
MICROWAVE EQUIPMENT
OXIDES
OXYGEN COMPOUNDS
Reproducibility of results
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
SQUID DEVICES
SQUIDs
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SUPERCONDUCTING JUNCTIONS
Superconductivity
SUPERCONDUCTORS
SURFACE FINISHING
TECHNOLOGY ASSESSMENT
TRANSITION ELEMENT COMPOUNDS
Wire
Yttrium barium copper oxide
YTTRIUM COMPOUNDS 665412 > Superconducting Devices-- (1992-)
YTTRIUM OXIDES
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Summary:A variety of techniques to reproducibly engineer microbridges in high-quality epitaxial YBCO films exist. A report is presented on two such techniques that have resulted in high-yield processes for fabricating both DC and RF SQUIDs operating at temperatures as high as 82 K. The results of these devices (step-edge microbridges) and focused-ion-beam microbridges) are compared with those of several other structures under investigation by other researchers.
ISSN:0018-9464
1941-0069
DOI:10.1109/20.133894