Influence of electron collisions inside the cathode sheath upon the electron energy spectrum in the negative glow region of a gas discharge

Computer models developed to solve the Boltzmann equation for the electron energy spectrum in both the cathode sheath and the negative glow region of a glow discharge are discussed. Electron collisions occurring during acceleration inside the cathode sheath partially determine the structure of the e...

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Bibliographic Details
Published in:IEEE journal of quantum electronics 1989-05, Vol.25 (5), p.948-954
Main Authors: Shi, B., Fetzer, G. J., Yu, Z., Meyer, J. D., Collins, G. J.
Format: Article
Language:English
Subjects:
Acceleration
Atomic measurements
Cathodes
Electric discharges
Electrons
Energy measurement
Equations
Exact sciences and technology
Glow discharges
Ionization
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Voltage
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Summary:Computer models developed to solve the Boltzmann equation for the electron energy spectrum in both the cathode sheath and the negative glow region of a glow discharge are discussed. Electron collisions occurring during acceleration inside the cathode sheath partially determine the structure of the electron energy distribution measured in the negative glow. The relative roles of elastic, excitation, and ionization collisions are examined using the computer model. Good qualitative agreement was obtained between calculated electron energy distributions and previous experimental measurements both at the sheath-plasma interface as well as in the negative glow region of the discharge.
ISSN:0018-9197
1558-1713
DOI:10.1109/3.27985