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Simulation of Gas-Phase Kinetics in CHF3 : H2 : O2 Mixtures
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Published in: | IEEE transactions on plasma science 2007, Vol.35 (6), p.1691-1703 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | Russian |
Online Access: | Get full text |
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ISSN: | 0093-3813 1939-9375 |