Center-Shift Method for the Characterization of Dielectric Charging in RF MEMS Capacitive Switches : International Conference on Microelectronic Test Structures

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing 2008, Vol.21 (2), p.148-153
Main Authors: HERFST, Rodolf W, STEENEKEN, Peter G, HUIZING, H. G. A, SCHMITZ, Jurriaan
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Micro- and nanoelectromechanical devices (mems/nems)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Switching, multiplexing, switched capacity circuits
Online Access:Get full text
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ISSN:0894-6507
1558-2345