Annealing Studies on Zinc Oxide Thin Films Deposited by Magnetron Sputtering: Groups in Nitrides, SiC and ZnO

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Bibliographic Details
Published in:Journal of electronic materials 2008, Vol.37 (5), p.764-769
Main Authors: TINGFANG YEN, STROME, Dave, SUNG JIN KIM, CARTWRIGHT, Alexander N, ANDERSON, Wayne A
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Electronics
Energy
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Natural energy
Optoelectronic devices
Photovoltaic conversion
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Solar cells. Photoelectrochemical cells
Solar energy
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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ISSN:0361-5235
1543-186X