Electrical Properties of Amorphous Bi5Nb3O15 Thin Film for RF MIM Capacitors

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Bibliographic Details
Published in:IEEE electron device letters 2008, Vol.29 (7), p.684-687
Main Authors: CHO, Kyung-Hoon, CHOI, Chang-Hak, KYOUNG PYO HONG, CHOI, Joo-Young, YOUNG HUN JEONG, NAHM, Sahn, KANG, Chong-Yun, YOON, Seok-Jin, LEE, Hwack-Joo
Format: Article
Language:English
Subjects:
Applied sciences
Dielectric, amorphous and glass solid devices
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0741-3106
1558-0563