Parameter Optimization of a Tribometric Device for Rapid Assessment of Substrate Surface Cleanliness

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Bibliographic Details
Published in:Optical memory & neural networks 2008, Vol.17 (2), p.167-172
Main Authors: KAZANSKIY, N. L, KOLPAKOV, V. A, KOLPAKOV, A. I, KRICHEVSKY, S. V, IVLIEV, N. A, DESJATOV, M. V
Format: Article
Language:Russian
Online Access:Get full text
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ISSN:1060-992X
1934-7898