Dispersion force for materials relevant for micro- and nanodevices fabrication

• Published in: Journal of physics. D, Applied physics Applied physics, 2008-09, Vol.41 (17), p.175405-175405 (11)
• Main Authors: Gusso, A, Delben, G J
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Exact sciences and technology; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics
• ISSN: 0022-3727; 1361-6463
• DOI: 10.1088/0022-3727/41/17/175405

The dispersion (van der Waals and Casimir) force between two semi-spaces is calculated using Lifshitz theory for different materials relevant for micro- and nanodevices fabrication, namely, gold, silicon, gallium arsenide, diamond and two types of diamond-like carbon, silicon carbide, silicon nitride and silicon dioxide. The calculations were performed using recent experimental optical data available in the literature, usually ranging from the far infrared up to the extreme ultraviolet bands of the electromagnetic spectrum. The results are presented in the form of a correction factor to the Casimir force predicted between perfect conductors, for the separation between the semi-spaces varying from 1 nm up to 1 mum. The relative importance of the contributions to the dispersion force of the optical properties in different spectral ranges is analysed. The role of temperature in semiconductors and insulators is also addressed. The results are meant to be useful for the estimation of the impact of the Casimir and van der Waals forces on the operational parameters of micro- and nanodevices.