Generation of Micro Inductively Coupled Plasma on a Chip: Images in Plasma Science

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Bibliographic Details
Published in:IEEE transactions on plasma science 2008, Vol.36 (4), p.1262-1263
Main Authors: TAGHIOSKOUI, Mazdak, ZAGHLOUL, Mona E, MONTASER, Akbar
Format: Article
Language:English
Subjects:
Discharges for spectral sources (including inductively coupled plasmas)
Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Online Access:Get full text
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ISSN:0093-3813
1939-9375