High-Sensitivity Metal-Semiconductor-Metal Hydrogen Sensors With a Mixture of Pd and SiO2 Forming Three-Dimensional Dipoles

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Bibliographic Details
Published in:IEEE electron device letters 2008-12, Vol.29 (12), p.1328-1331
Main Authors: CHIU, Shao-Yen, HUANG, Hsuan-Wei, HUANG, Tze-Hsuan, LIANG, Kun-Chieh, LIU, Kang-Ping, TSAI, Jung-Hui, LOUR, Wen-Shiung
Format: Article
Language:English
Subjects:
Applied sciences
Compound structure devices
Electronics
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2008.2006994