Highly preferred crystalline carbon thin films obtained by DC magnetron sputtering with a hot filament

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Bibliographic Details
Main Authors: KAWAI, Y, MYO THAN OO, NAKAO, M, KAMIMURA, K, MATSUSHIMA, H, ONUMA, Y
Format: Conference Proceeding
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Online Access:Get full text
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ISSN:0169-4332
1873-5584