Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

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Bibliographic Details
Main Authors: RODRIGUEZ, Ainara, ECHEVERRIA, Mikel, OLAIZOLA, Santiago M, ELLMAN, Miguel, PEREZ, Noemi, VEREVKIN, Yuri K, PENG, Changsi S, BERTHOU, Thierry, ZUOBIN WANG, AYERDI, Isabel, SAVALL, Joan
Format: Conference Proceeding
Language:Russian
Online Access:Get full text
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ISSN:0167-9317
1873-5568