Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

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Main Authors: RODRIGUEZ, Ainara, ECHEVERRIA, Mikel, OLAIZOLA, Santiago M, ELLMAN, Miguel, PEREZ, Noemi, VEREVKIN, Yuri K, PENG, Changsi S, BERTHOU, Thierry, ZUOBIN WANG, AYERDI, Isabel, SAVALL, Joan
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Language:Russian
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container_issue 4-6
container_start_page 937
container_title
container_volume 86
creator RODRIGUEZ, Ainara
ECHEVERRIA, Mikel
OLAIZOLA, Santiago M
ELLMAN, Miguel
PEREZ, Noemi
VEREVKIN, Yuri K
PENG, Changsi S
BERTHOU, Thierry
ZUOBIN WANG
AYERDI, Isabel
SAVALL, Joan
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identifier ISSN: 0167-9317
ispartof Microelectronic engineering, 2009, Vol.86 (4-6), p.937-940
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1873-5568
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source ScienceDirect Freedom Collection
title Laser interference lithography for nanoscale structuring of materials: From laboratory to industry
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