Higher-K dielectrics for advanced silicon microelectronic devices: A combinatorial research study

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Bibliographic Details
Main Authors: GREEN, M. L, SCHENCK, P. K, CHANG, K.-S, RUGLOVSKY, J, VAUDIN, M
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Integrated circuits by function (including memories and processors)
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0167-9317
1873-5568