Low-loss NbTiN films for THz SIS mixer tuning circuits

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Bibliographic Details
Published in:International journal of infrared and millimeter waves 1998-03, Vol.19 (3), p.373-383
Main Authors: KOOI, J. W, STERN, J. A, CHATTOPADHYAY, G, LEDUC, H. G, BUMBLE, B, ZMUIDZINAS, J
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Superconducting devices
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ISSN:0195-9271
1572-9559
DOI:10.1023/A:1022595223782