Study of plasma parameter's distribution upon electrical wire explosion: Carbon-free SiOx films deposited from octamethylcyclotetrasiloxane

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Bibliographic Details
Published in:The European physical journal. D, Atomic, molecular, and optical physics Atomic, molecular, and optical physics, 2009, Vol.54 (2), p.335-341
Main Authors: TKACHENKO, S. I, ROMANOVA, V. M, MINGALEEV, A. R, TER-OGANESYAN, A. E, SHELKOVENKO, T. A, PIKUZ, S. A
Format: Article
Language:Russian
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ISSN:1434-6060
1434-6079