Observations of extreme ultraviolet emission from plasma produced by capillary discharges: Carbon-free SiOx films deposited from octamethylcyclotetrasiloxane

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Bibliographic Details
Published in:The European physical journal. D, Atomic, molecular, and optical physics Atomic, molecular, and optical physics, 2009, Vol.54 (2), p.377-382
Main Authors: NOWAKOWSKA-LANGIER, K, JAKUBOWSKI, L, BARONOVA, E. O, CZAUS, K, RABINSKI, M, JAKUBOWSKI, M. J
Format: Article
Language:Russian
Online Access:Get full text
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ISSN:1434-6060
1434-6079