H-mode inductive coupling plasma for PVC surface treatment: Carbon-free SiOx films deposited from octamethylcyclotetrasiloxane

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Bibliographic Details
Published in:The European physical journal. D, Atomic, molecular, and optical physics Atomic, molecular, and optical physics, 2009, Vol.54 (2), p.477-480
Main Authors: CROCCOLO, F, QUINTINI, A, BARNI, R, RIPAMONTI, M, MALGAROLI, A, RICCARDI, C
Format: Article
Language:English
Subjects:
Discharges for spectral sources (including inductively coupled plasmas)
Electric and magnetic measurements
Electric discharges
Etching and cleaning
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma diagnostic techniques and instrumentation
Plasma properties
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ISSN:1434-6060
1434-6079