Speciation of BCxNy films grown by PECVD with trimethylborazine precursor: Analytical Science in Germany

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Bibliographic Details
Published in:Analytical and bioanalytical chemistry 2009, Vol.395 (6), p.1901-1909
Main Authors: BAAKE, Olaf, HOFFMANN, Peter S, KLEIN, Andreas, POLLAKOWSKI, Beatrix, BECKHOFF, Burkhard, KOSINOVA, Marina L, FAINER, Nadeshda I, SULYAEVA, Veronica S, TRUNOVA, Valentina A, ENSINGER, Wolfgang
Format: Article
Language:Russian
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ISSN:1618-2642
1618-2650