Speciation of BCxNy films grown by PECVD with trimethylborazine precursor: Analytical Science in Germany

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Published in:Analytical and bioanalytical chemistry 2009, Vol.395 (6), p.1901-1909
Main Authors: BAAKE, Olaf, HOFFMANN, Peter S, KLEIN, Andreas, POLLAKOWSKI, Beatrix, BECKHOFF, Burkhard, KOSINOVA, Marina L, FAINER, Nadeshda I, SULYAEVA, Veronica S, TRUNOVA, Valentina A, ENSINGER, Wolfgang
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container_end_page 1909
container_issue 6
container_start_page 1901
container_title Analytical and bioanalytical chemistry
container_volume 395
creator BAAKE, Olaf
HOFFMANN, Peter S
KLEIN, Andreas
POLLAKOWSKI, Beatrix
BECKHOFF, Burkhard
KOSINOVA, Marina L
FAINER, Nadeshda I
SULYAEVA, Veronica S
TRUNOVA, Valentina A
ENSINGER, Wolfgang
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title Speciation of BCxNy films grown by PECVD with trimethylborazine precursor: Analytical Science in Germany
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