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Influence of the defect density (twins boundaries) on electrical parameters of 3C-SiC epitaxial films

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Bibliographic Details
Main Authors: LEBEDEV, Alexander A, ABRAMOV, Pavel L, LEBEDEV, Sergey P, OGANESYAN, Gagik A, TREGUBOVA, Alla S, SHAMSHUR, Dmitrii V
Format: Conference Proceeding
Language:Russian
Online Access:Get full text
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ISSN:0921-4526
1873-2135