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container_issue 5
container_start_page 1369
container_title Thin solid films
container_volume 518
creator CHAN, Mu-Hsuan
LU, Fu-Hsing
description
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issn 0040-6090
1879-2731
language eng
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source ScienceDirect Freedom Collection 2022-2024
subjects Catalysis
Catalysts: preparations and properties
Chemistry
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
General and physical chemistry
General, apparatus
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
Surface physical chemistry
Theory of reactions, general kinetics. Catalysis. Nomenclature, chemical documentation, computer chemistry
title Characterization of N-doped TiO2 films prepared by reactive sputtering using air/Ar mixtures
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