Numerical ellipsometry: Analysis of thin metal layers using n-k plane methods with multiple incidence angles

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Bibliographic Details
Published in:Thin solid films 2010, Vol.518 (5), p.1411-1414
Main Authors: URBAN, F. K, BARTON, D, TIWALD, T
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Online Access:Get full text
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ISSN:0040-6090
1879-2731