Improved Stress Reliability of Analog Metal―Insulator―Metal Capacitors Using TiO2/ZrO2 Dielectrics

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Bibliographic Details
Published in:IEEE electron device letters 2009-12, Vol.30 (12), p.1287-1289
Main Authors: LIN, S. H, CHIANG, K. C, YEH, F. S, CHIN, Albert
Format: Article
Language:English
Subjects:
Applied sciences
Compound structure devices
Dielectric, amorphous and glass solid devices
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2009.2034113