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Three-Dimensional Stackable Electromechanical Nonvolatile Memory Cell (H Cell) for Four-Bit Operation
A novel H-cell design has been proposed and successfully demonstrated. To the best of the author's knowledge, it is the first CMOS-compatible electromechanical nonvolatile memory that shows the feasibility of 4-bit operation experimentally. The fabricated prototype H cell shows a reasonable per...
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Published in: | IEEE electron device letters 2010-01, Vol.31 (1), p.29-31 |
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Main Author: | |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A novel H-cell design has been proposed and successfully demonstrated. To the best of the author's knowledge, it is the first CMOS-compatible electromechanical nonvolatile memory that shows the feasibility of 4-bit operation experimentally. The fabricated prototype H cell shows a reasonable performance, except for the endurance property that will be overcome by reducing the cell size and introducing a new beam material. The H cell can be used for high-density and low-power 3-D stackable electromechanical nonvolatile memory. |
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ISSN: | 0741-3106 1558-0563 |
DOI: | 10.1109/LED.2009.2035342 |