Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications : Beyond silicon: Carbon-based nanotechnology

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Bibliographic Details
Published in:MRS bulletin 2010, Vol.35 (4), p.281-288
Main Authors: SUMANT, Anirudha V, AUCIELLO, Orlando, CARPICK, Robert W, SRINIVASAN, Sudarsan, BUTLER, James E
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
Online Access:Get full text
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ISSN:0883-7694
1938-1425