Piezoresistive force sensor developed for use in handling of microparts

Micromechanical structures must be assembled where monolithic integration is not feasible because of incompatible processes, complex geometries or different materials involved. In the assembling process, the problem of measurement of small forces arises. This paper presents the development of a very...

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Bibliographic Details
Main Authors: Delic, N., Vujanic, A., Detter, H., Djuric, Z., Simicic, N., Petrovic, R.
Format: Conference Proceeding
Language:English
Subjects:
Acoustic wave devices, piezoelectric and piezoresistive devices
Applied sciences
Assembly
Design optimization
Electronics
Exact sciences and technology
Force measurement
Force sensors
General equipment and techniques
Geometry
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Linearity
Mechanical instruments, equipment and techniques
Micromechanical devices
Micromechanical devices and systems
Monolithic integrated circuits
Physics
Piezoresistance
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Temperature sensors
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Summary:Micromechanical structures must be assembled where monolithic integration is not feasible because of incompatible processes, complex geometries or different materials involved. In the assembling process, the problem of measurement of small forces arises. This paper presents the development of a very sensitive piezoresistive force sensor with high linearity of the output signal. Sensor design considerations, optimisation of the geometry and the measurement results are presented. The inherent sensitivity of the piezoresistive sensors to temperature is strongly reduced by using the double bridge temperature compensation technique on the same chip.
DOI:10.1109/ICMEL.1997.632894