Fabrication of superficial neuromast inspired capacitive flow sensors

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2010-08, Vol.20 (8), p.085041
Main Authors: Izadi, N, de Boer, M J, Berenschot, J W, Krijnen, G J M
Format: Article
Language:English
Subjects:
Applied sciences
Chemistry
Colloidal state and disperse state
Electronics
Exact sciences and technology
General and physical chemistry
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Membranes
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/20/8/085041