Polysilicon process development for fully integrated surface-micromachined accelerometer with CMOS electronics

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Bibliographic Details
Published in:Sensors and actuators. A, Physical Physical, 1998-06, Vol.68 (1-3), p.238-243
Main Authors: KING, D. O, WARD, M. C. L, BRUNSON, K. M, HAMILTON, D. J
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Integrated circuits
Mechanical instruments, equipment and techniques
Microelectronics: LSI, VLSI, ULSI
integrated circuit fabrication technology
Micromechanical devices and systems
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(97)01782-2