Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane

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Bibliographic Details
Published in:Analytical and bioanalytical chemistry 2010, Vol.398 (2), p.1077-1084
Main Authors: BAAKE, Olaf, HOFFMANN, Peter S, KOSINOVA, Marina L, KLEIN, Andreas, POLLAKOWSKI, Beatrix, BECKHOFF, Burkhard, FAINER, Nadeshda I, TRUNOVA, Valentina A, ENSINGER, Wolfgang
Format: Article
Language:Russian
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ISSN:1618-2642
1618-2650