Electric double layer effect in a nano-scale Si02 sacrificial layer etching process and its application in nanowire fabrication

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2010, Vol.20 (10)
Main Authors: YIBIN GONG, PENGFEI DAI, ANRAN GAO, TIE LI, PING ZHOU, YUELIN WANG
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of nanofabrication
Nanoscale materials and structures: fabrication and characterization
Physics
Online Access:Get full text
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ISSN:0960-1317
1361-6439