Microscale Friction Reduction by Normal Force Modulation in MEMS: Adhesion Aspects in MEMS/NEMS

Saved in:
Bibliographic Details
Published in:Journal of adhesion science and technology 2010, Vol.24 (15-16), p.2669-2680
Main Authors: VAN SPENGEN, W. M, WIJTS, G. H. C. J, TURQ, V, FRENKEN, J. W. M
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Micro- and nanoelectromechanical devices (mems/nems)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0169-4243
1568-5616