Direct metal contact printing lithography for patterning sub-micrometer surface structures on a sapphire substrate

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2011-01, Vol.21 (1), p.015001
Main Authors: Hsieh, Yi-Ta, Lee, Yung-Chun
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electronics
Electrooptical effects
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/21/1/015001