Cathodoluminescence depth analysis in SiO2-Si-systems

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Bibliographic Details
Published in:Fresenius' journal of analytical chemistry 1998-07, Vol.361 (6-7), p.560-561
Main Authors: GOLDBERG, M, BARFELS, T, FITTING, H.-J
Format: Article
Language:English
Subjects:
Cathodoluminescence, ionoluminescence
Chemical composition analysis, chemical depth and dopant profiling
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Materials testing
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Other luminescence and radiative recombination
Physics
Online Access:Get full text
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ISSN:0937-0633
1432-1130
DOI:10.1007/s002160050947