Spectroscopic determination of carbon dimer densities in Ar-H2-CH4 and Ar-H2-C60 plasmas

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 1998-08, Vol.31 (16), p.1975-1986
Main Authors: GOYETTE, A. N, LAWLER, J. E, ANDERSON, L. W, GRUEN, D. M, MCCAULEY, T. G, ZHOU, D, KRAUSS, A. R
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Clusters, nanoparticles, and nanocrystalline materials
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Materials synthesis
materials processing
Methods of deposition of films and coatings
film growth and epitaxy
Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals
Physics
Structure of solids and liquids
crystallography
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/31/16/006