TiNxOy/TiN dielectric contrasts obtained by ion implantation of O+2; structural, optical and electrical properties

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2011, Vol.44 (23)
Main Authors: PUNZON QUIJORNA, E, TORRES COSTA, V, AGULLO-RUEDA, F, HERRERO FERNANDEZ, P, CLIMENT, A, ROSSI, F, MANSO SILVAN, M
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion radiation effects
Materials science
Physical radiation effects, radiation damage
Physics
Radiation treatments
Structure of solids and liquids
crystallography
Treatment of materials and its effects on microstructure and properties
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ISSN:0022-3727
1361-6463