A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits

Saved in:
Bibliographic Details
Published in:Journal of micromechanics and microengineering 2011-06, Vol.21 (6), p.065012
Main Authors: Chen, Wen-Chien, Fang, Weileun, Li, Sheng-Shian
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/21/6/065012