Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2011-07, Vol.21 (7), p.074012
Main Authors: Aarts, A A A, Srivannavit, O, Wise, K D, Yoon, E, Puers, R, Van Hoof, C, Neves, H P
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/21/7/074012