Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2011-12, Vol.21 (12), p.125007
Main Authors: Gosálvez, M A, Pal, Prem, Ferrando, N, Hida, H, Sato, K
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/21/12/125007