The energy distribution function of ions impinging on nanoparticles in a collisional low-pressure plasma

A self-consistent particle-in-cell/Monte Carlo collision (PIC/MCC) simulation is used to calculate the ion energy distribution (IED) function of ions impinging on the surface of nanoparticles in low-pressure argon plasmas. The computation includes the effects of resonant charge-exchange and elastic...

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Bibliographic Details
Published in:Plasma sources science & technology 2012-06, Vol.21 (3), p.35002-1-8
Main Authors: Galli, Federico, Mamunuru, Meenakshi, Kortshagen, Uwe R
Format: Article
Language:English
Subjects:
Argon plasma
Computer simulation
Electron energy distribution
Exact sciences and technology
Mathematical analysis
Mathematical models
Monte Carlo methods
Nanoparticles
Particle in cell technique
Particle-in-cell method
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma simulation
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Summary:A self-consistent particle-in-cell/Monte Carlo collision (PIC/MCC) simulation is used to calculate the ion energy distribution (IED) function of ions impinging on the surface of nanoparticles in low-pressure argon plasmas. The computation includes the effects of resonant charge-exchange and elastic collisions between ions and neutrals through a Monte Carlo null-collision method and considers both Maxwellian and non-Maxwellian electron energy distributions. Results show a strong dependence of the IED on pressure. Intermediate pressures yield a remarkable reduction in the average ion energy and an enhancement in the ion flux to the surface of the nanoparticles.
ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/21/3/035002