Pattern transfer to silicon by microcontact printing and RIE : Ordered molecular and nanoscale electronics

Saved in:
Bibliographic Details
Published in:Nanotechnology 1996, Vol.7 (4), p.447-451
Main Authors: WHIDDEN, T. K, FERRY, D. K, KOZICKI, M. N, KIM, E, KUMAR, A, WILBUR, J, WHITESIDES, G. M
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0957-4484
1361-6528