Capacitance Analysis of Highly Leaky Al2O3 MIM Capacitors Using Time Domain Reflectometry

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Bibliographic Details
Published in:IEEE electron device letters 2012-09, Vol.33 (9), p.1303-1305
Main Authors: KIM, Yonghun, YOUNG GON LEE, KWAN YONG LIM, BYOUNG HUN LEE, KIM, Minwoo, CHANG GOO KANG, JUNG, Ukjin, JIN JU KIM, SEUNG CHUL SONG, BLATCHFORD, James, KIRKPATRICK, Brian, NIIMI, Hiro
Format: Article
Language:English
Subjects:
Applied sciences
Compound structure devices
Dielectric, amorphous and glass solid devices
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2012.2205213