Design and Realization Aspects of 1-THz Cascade Backward Wave Amplifier Based on Double Corrugated Waveguide

The design and fabrication challenges in the first ever attempt to realize a 1-THz vacuum tube amplifier are described. Implementation of innovative solutions including a slow-wave structure in the form of a double corrugated waveguide, lateral tapered input and output couplers, deep X-ray LIGA fabr...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2013-03, Vol.60 (3), p.1236-1243
Main Authors: Paoloni, C., Di Carlo, A., Bouamrane, F., Bouvet, T., Durand, A. J., Kotiranta, M., Krozer, V., Megtert, S., Mineo, M., Zhurbenko, V.
Format: Article
Language:English
Subjects:
Applied sciences
Cascade backward wave amplifier
Circuit properties
Copper
Couplers
double corrugated waveguide
Electric, optical and optoelectronic circuits
Electron tubes
Electronic tubes, masers
Electronics
Exact sciences and technology
Fabrication
Microelectronic fabrication (materials and surfaces technology)
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Optical waveguides
optically driven terahertz amplifier (OPTHER)
Rough surfaces
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surface roughness
terahertz
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Summary:The design and fabrication challenges in the first ever attempt to realize a 1-THz vacuum tube amplifier are described. Implementation of innovative solutions including a slow-wave structure in the form of a double corrugated waveguide, lateral tapered input and output couplers, deep X-ray LIGA fabrication process, and a cascade architecture of the backward wave amplifier are discussed. New knowledge in the field of terahertz vacuum devices brought by intensive simulations and development of advanced fabrication and assembly processes of the micro-structures is highlighted.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2013.2240686