A Survey of Yield Modeling and Yield Enhancement Methods

Fast yield learning is critical to bringing products to the market in a timely fashion and is strongly linked to product revenues. This paper reviews methods to enable efficient yield learning, focusing on methods to quantify the most significant yield detractors and on in-line excursion detection m...

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing 2013-05, Vol.26 (2), p.196-213
Main Author: Milor, L.
Format: Article
Language:English
Subjects:
Applied sciences
Data models
Exact sciences and technology
Excursion detection
Firm modelling
Mathematical model
Operational research and scientific management
Operational research. Management science
Probes
Production
random yield
Semiconductor device modeling
systematic yield
Systematics
Throughput
yield
yield enhancement
yield modeling
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Description
Summary:Fast yield learning is critical to bringing products to the market in a timely fashion and is strongly linked to product revenues. This paper reviews methods to enable efficient yield learning, focusing on methods to quantify the most significant yield detractors and on in-line excursion detection methodologies.
ISSN:0894-6507
1558-2345
DOI:10.1109/TSM.2013.2243766