Zeolitic imidazolate framework-coupled resonators for enhanced gas detection

This work presents for the first time a zeolitic imidazolate framework (ZIF)-coupled resonant gas sensor whose sensitivity shows an improvement up to 78 times over bare silicon resonant sensors with identical dimensions. ZIFs are among the highest surface area material used for resonant-based sensin...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2013-12, Vol.23 (12), p.125027-5
Main Authors: Hwang, Yongha, Phan, Anh, Galatsis, Kosmas, Yaghi, Omar M, Candler, Rob N
Format: Article
Language:English
Subjects:
Crystals
Exact sciences and technology
gas detectors
Gas sensors
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Joining
Microengineering
Micromechanics
microsensors
Physics
Resonators
sensitivity
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Silicon
Surface area
zeolitic imidazolate framework
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Summary:This work presents for the first time a zeolitic imidazolate framework (ZIF)-coupled resonant gas sensor whose sensitivity shows an improvement up to 78 times over bare silicon resonant sensors with identical dimensions. ZIFs are among the highest surface area material used for resonant-based sensing. We utilize high surface area-to-volume ratios of ZIFs to demonstrate how a microresonator coupled with ZIF crystals can provide high sensitivity to chemical vapors.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/23/12/125027