Characterization of ferroelectric SrBi2Ta2O9 thin films deposited by a radio frequency magnetron sputtering technique

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1997, Vol.144 (8), p.2855-2858
Main Authors: PARK, S.-S, YANG, C.-H, YOON, S.-G, AHN, J.-H, KIM, H.-G
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Dielectric thin films
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1837907