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Atmospheric pressure plasma enhanced chemical vapor deposition of hydrophobic coatings using fluorine-based liquid precursors: Atmospheric Pressure Plasma
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Published in: | Surface & coatings technology 2013, Vol.234, p.21-32 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0257-8972 1879-3347 |